Thermo-chemical Polishing of CVD Diamond Thin Film by Wire Brush
نویسندگان
چکیده
منابع مشابه
Chemical mechanical polishing of thin film diamond
The demonstration that Nanocrystalline Diamond (NCD) can retain the superior Young’s modulus (1100 GPa) of single crystal diamond twinned with its ability to be grown at low temperatures (<450 C) has driven a revival into the growth and applications of NCD thin films. However, owing to the competitive growth of crystals the resulting film has a roughness that evolves with film thickness, preven...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2012
ISSN: 0912-0289,1882-675X
DOI: 10.2493/jjspe.78.81